Resonance Frequency Tracking for MEMS Gyroscopes Using Recursive Identification.

Summary MEMS gyroscopes are generally made up of two resonant systems: the so-called drive and sense modes. It is well known that the drive-mode resonance tracking is crucial to make the device operate accurately. In this paper, we propose an approach based on recursive identification that allows to estimate the resonance frequency over the time. The proposed approach pertains to a recently developed control conguration which is based on the H ∞ control framework. * The financial support of BPI France (Next4MEMS project) is gratefully acknowledged.